Lumera Foundry and Design Services
In addition to electro-optic devices, Lumera offers foundry services and custom design services. An onsite temperature and humidity controlled Class 100 cleanroom has capabilities of handling 3" to 6" wafers, as well as those which may be of non-standard dimensions and materials.
Some of the processes include the following:
- Sputter deposition: *Cr, Au, Ti
- Wet chemical etch:
- Cr, Au, Ti, SiO2
- Dry etch: *Ti, SiO2
- Deep polymer etch:
- Sub-micron, CD-controlled waveguide splitters
- Deep trench etching up to 20 µm, with aspect ratios of <5:1
- Spin-coating of polymer-based materials:
- Curing: *UV exposure, hot plate, oven, and vacuum
- Contact photolithography
- Au electroplating:
- Optimized high-density, low roughness films for low RF Loss
- Contact surface profiling
- Optical inspection
- Slab waveguide loss measurements
- Leak-through current measurements
- Electrical and optical RF testing up to 65 GHz
- Chip packaging
- In conjunction with partner:
- SiO2 etching
- Thermal oxidation of Silicon
- Deep silicon etching
- Sputter deposition and evaporation
- PECVD and LPCVD deposition
- SEM/AFM
Lumera also offers design services, for custom materials, active devices, and passive devices. Such devices and design services may include but not be limited to the following:
- Waveguides, with precise index properties:
- AWG based optical multiplexers and demultiplexers
- Waveguide structures integrated with active devices
- Electro-optic devices:
- Modulators
- Ultra-high bandwidth (over 100GHz)
- Very low Vp, insertion loss
- High extinction ratio
- Small footprint
- Optical switches
- Optical interconnects, to mitigate effects that electrical interconnects suffer at very high data rates:
- Chip-to-chip interconnects
- Backplanes, line cards
- Modulators